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Investigation of the thermal stability of Mg/Co periodic multilayers for EUV applications (Articolo in rivista)

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Investigation of the thermal stability of Mg/Co periodic multilayers for EUV applications (Articolo in rivista) (literal)

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Hu, M.H.;Le Guen, K.;André, J.M.;Zhou, Z.S.;Li, H.C.; Zhu, J.T.; Wang, Z.S.; Meny, C.; Mahne, N.; Giglia, A.; · Nannarone, S.; I. Estève; Walls, M.; Jonnard, P. (2012)
Investigation of the thermal stability of Mg/Co periodic multilayers for EUV applications
in Applied physics. A, Materials science & processing (Print); Springer, Berlin (Germania)
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Hu, M.H.;Le Guen, K.;André, J.M.;Zhou, Z.S.;Li, H.C.; Zhu, J.T.; Wang, Z.S.; Meny, C.; Mahne, N.; Giglia, A.; · Nannarone, S.; I. Estève; Walls, M.; Jonnard, P. (literal)

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M.-H. Hu · K. Le Guen · J.-M. André · P. Jonnard, Laboratoire Chimie Physique--Matière Rayonnement, UPMC, Univ Paris 06, CNRS UMR 7614, 11 rue Pierre et Marie Curie, 75231 Paris Cedex 05, France S.K. Zhou · H.C. Li · J.T. Zhu · Z.S. Wang, Institute of Precision Optical Engineering, Department of Physics, Tongji University, Shanghai 200092, P.R. China C. Meny, Institut de Physique et Chimie des Matériaux de Strasbourg, CNRS UMR 7504, 23 rue du Loess, BP 43, 67034 Strasbourg, Cedex 2, France N. Mahne · A. Giglia · S. Nannarone, CNR-IOM Laboratorio TASC, SS 14 km 163,5, 34149 Basovizza, Trieste, Italy S. Nannarone, Dipartimento Ingegneria Materiali, Università di Modenae R.E., via Vignolese 905/a, Modena, Italy I. Estève, Institut de Minéralogie et de Physique des Milieux Condensés, Univ Paris 06 et 07, CNRS UMR 7590, 4 place Jussieu, 75252 Paris Cedex 05, France M. Walls, Laboratoire de Physiques des Solides, CNRS UMR 8502, Univ Paris Sud, 91405 Orsay, France (literal)

Titolo

Investigation of the thermal stability of Mg/Co periodic multilayers for EUV applications (literal)

Abstract

We present the results of the characterization of Mg/Co periodic multilayers and their thermal stability for the EUV range. The annealing study is performed up to a temperature of 400?C. Images obtained by scanning transmission electron microscopy and electron energy loss spectroscopy clearly show a good quality of the multilayer structure. The measurements of the EUV reflectivity around 25 nm (~49 eV) indicate that the reflectivity decreases when the annealing temperature increases above 300?C. X-ray emission spectroscopy is performed to determine the chemical state of the Mg atoms within the Mg/Co multilayer. Nuclear magnetic resonance used to determine the chemical state of the Co atoms and scanning electron microscopy images of cross sections of the Mg/Co multilayers reveal changes in the morphology of the stack from an annealing temperature of 305?C. This explains the observed reflectivity loss. (literal)

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