http://www.cnr.it/ontology/cnr/individuo/prodotto/ID185091

Hybrid porous resist with sensing functionality (Articolo in rivista)

Type

Articolo in rivista (Classe)
Prodotto della ricerca (Classe)

Label

Hybrid porous resist with sensing functionality (Articolo in rivista) (literal)

Anno

2011-01-01T00:00:00+01:00 (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#doi

10.1016/j.mee.2010.12.009 (literal)

Alternative label

Brigo, L; Grenci, G; Bau, L; Carpentiero, A; Mancin, F; Romanato, F; Tormen, M; Guglielmi, M; Brusatin, G (2011)
Hybrid porous resist with sensing functionality
in Microelectronic engineering; ELSEVIER SCIENCE BV, PO BOX 211, 1000 AE AMSTERDAM, NETHERLANDS, AMSTERDAM (Paesi Bassi)
(literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori

Brigo, L; Grenci, G; Bau, L; Carpentiero, A; Mancin, F; Romanato, F; Tormen, M; Guglielmi, M; Brusatin, G (literal)

Pagina inizio

1913 (literal)

Pagina fine

1916 (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume

88 (literal)

Rivista

Microelectronic engineering (Rivista)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#pagineTotali

4 (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroFascicolo

8 (literal)

Note

ISI Web of Science (WOS) (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni

Univ Padua, Dept Mech Engn, Mat Sect, I-35131 Padua, Italy; CNR IOM TASC Lab, I-34149 Trieste, Italy; Univ Padua, Dept Chem Sci, I-35131 Padua, Italy; Univ Padua, Phys Dept Galileo Galilei, I-35131 Padua, Italy; Veneto Nanotech, Lab Nanofabricat Nanodevices, I-35129 Padua, Italy (literal)

Titolo

Hybrid porous resist with sensing functionality (literal)

Abstract

Natively porous hybrid organic-inorganic sol-gel systems have been engineered to be used as functional positive photoresists, aimed to the realization of microsensors in a single-step process. Interesting results have been obtained combing three main sol-gel system features: the direct pattern-ability through X-ray lithography, being processable without the addition of a photocatalyst; the functionalizability, properly designing the organic component of the hybrid network or incorporating active species; the open micro or mesoporosity, tailored by the synthesis process and precursor choice. The photoprocessable porous films have been synthesized starting from a Bridged Polysilsesquioxane (BPS) precursor, 1,4-bis(triethoxysilyl)benzene. The correlation between chemical properties of the solgel material and its patternability is described in detail. X-ray exposure leads to a progressive alkyl and aromatic compound elimination and promotes inorganic condensation in the system, allowing the selective dissolution of irradiated cross-linked films in suitable etchants. Patterns of final resolution lower than 100 nm have been realized on BPS-based films synthesized in acid conditions, a procedure that allows to take advantage of a straightforward embedding protocol for active species in the sol-gel matrix. The BPS-based system has been doped with a covalently linked quinolinium dye, obtaining thin sensing films patternable by X-ray lithography. A feasibility test for the fabrication of optical microdevices, where fluorescence properties are obtained directly on the patterned coatings, has been provided. (C) 2010 Elsevier B.V. All rights reserved. (literal)

Editore