Wafer-level testing of thermopile IR detectors (Contributo in atti di convegno)

Type
Label
  • Wafer-level testing of thermopile IR detectors (Contributo in atti di convegno) (literal)
Anno
  • 2005-01-01T00:00:00+01:00 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#doi
  • 10.1109/ICSENS.2005.1597904 (literal)
Alternative label
  • Mancarella F; Roncaglia A; Passini M; Sanmartin M; Cardinali GC; Severi M (2005)
    Wafer-level testing of thermopile IR detectors
    in IEEE Sensors 2005, Irvine, CA, Oct. 30 2005-Nov. 3 2005
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • Mancarella F; Roncaglia A; Passini M; Sanmartin M; Cardinali GC; Severi M (literal)
Pagina inizio
  • 1133 (literal)
Pagina fine
  • 1136 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#url
  • http://ieeexplore.ieee.org/xpl/articleDetails.jsp?tp=&arnumber=1597904&contentType=Conference+Publications&searchField%3DSearch_All%26queryText%3DWafer-level+testing+of+thermopile+IR+detectors (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#titoloVolume
  • Proceedings of IEEE Sensors 2005 (literal)
Rivista
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#pagineTotali
  • 4 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
  • CNR IMM Bologna (literal)
Titolo
  • Wafer-level testing of thermopile IR detectors (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#isbn
  • 0-7803-9056-3 (literal)
Abstract
  • We propose a method to characterize the main figures of merit of IR thermopile detectors by means of electrical measurements performed at the wafer level. Finite element simulations are adopted in order to compare the results of wafer-level measurements with the actual device responsivity as expected by optical measurements. The employed finite-element model is validated by comparison with experimental data obtained on a micromachined thermal test structure (literal)
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