Features of arsenic clusters in silicon (Articolo in rivista)

Type
Label
  • Features of arsenic clusters in silicon (Articolo in rivista) (literal)
Anno
  • 2005-01-01T00:00:00+01:00 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#doi
  • 10.1002/pssc.200461723 (literal)
Alternative label
  • Nobili D; Solmi S; (2005)
    Features of arsenic clusters in silicon
    in Physica status solidi. C, Current topics in solid state physics (Internet); Wiley-VCH Verlag Gmbh, Weinheim (Germania)
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • Nobili D; Solmi S; (literal)
Pagina inizio
  • 3681 (literal)
Pagina fine
  • 3685 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume
  • 2 (literal)
Rivista
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#pagineTotali
  • 5 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroFascicolo
  • 10 (literal)
Note
  • ISI Web of Science (WOS) (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
  • CNR-IMM Sezione di Bologna, Via Gobetti, 101-40129 Bologna, Italy (literal)
Titolo
  • Features of arsenic clusters in silicon (literal)
Abstract
  • The solid solubility of As in silicon, the ionisation equilibria at different dopant concentrations and temperatures and the algorithms that describe these phenomena are reviewed and discussed. Experimental evidence of the occurrence of different types of clusters is presented. The correlation of clustering equilibria with As diffusivity is shown by suitable experiments. Finally we report and discuss the kinetics of As deactivation and the influence of excess point defects on the clustering process. (literal)
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Autore CNR

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