Quantitative modelization of particle emission from excited solids: application to spectroscopic diagnostics of buried interfaces in multilayer (Contributo in atti di convegno)

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Label
  • Quantitative modelization of particle emission from excited solids: application to spectroscopic diagnostics of buried interfaces in multilayer (Contributo in atti di convegno) (literal)
Anno
  • 2007-01-01T00:00:00+01:00 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#doi
  • 10.1117/12.722922 (literal)
Alternative label
  • Nicola Mahne(1); Angelo Giglia(1); Stefano Nannarone(1,2); Juri Bertoli(3,4); Valentina Mattarello(3,4); Valentino Rigato(3,4) (2007)
    Quantitative modelization of particle emission from excited solids: application to spectroscopic diagnostics of buried interfaces in multilayer
    in Damage to VUV, EUV, and X-ray Optics, Prague, Czech Republic, 18 April 2007
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • Nicola Mahne(1); Angelo Giglia(1); Stefano Nannarone(1,2); Juri Bertoli(3,4); Valentina Mattarello(3,4); Valentino Rigato(3,4) (literal)
Pagina inizio
  • 1 (literal)
Pagina fine
  • 9 (literal)
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  • http://spiedigitallibrary.org/proceedings/resource/2/psisdg/6586/1/65860V_1?isAuthorized=no (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#titoloVolume
  • Damage to VUV, EUV, and X-ray Optics (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume
  • 6586 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#volumeInCollana
  • 6586 (literal)
Rivista
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  • 9 (literal)
Note
  • ISI Web of Science (WOS) (literal)
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  • (1)Beamline BEAR, CNR-Laboratorio TASC-INFM, SS. 14 Km. 163.5 34012 Basovizza (TS), Italia (2) Dipartimento di Ingegneria dei Materiali e dell'Ambiente dell'Universita' di Modena e Reggio Emilia, Via Vignolese 905, Modena, Italia; (3) Laboratori Nazionali di Legnaro- INFN, Viale dell'Università 2, 35020 Legnaro (PD), Italia; (4) Media Lario Technologies, Località Pascolo, 23842 Bosisio Parini (LC), Italia; (literal)
Titolo
  • Quantitative modelization of particle emission from excited solids: application to spectroscopic diagnostics of buried interfaces in multilayer (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#isbn
  • 978-0-8194-6714-0 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#curatoriVolume
  • Juha, L; Sobierajski, RH; Wabnitz, H (literal)
Abstract
  • The performance of multilayer optics depends on the quality of interfaces between spacer and absorber materials. Intermixing at the interfaces affects the optical behavior. An experimental method is presented here to obtain the amount of intermixing at the buried interfaces of multilayer structures. The method is based on the combined use of photoemission and a rocking scan through the Bragg peak. The possibility of obtaining quantitative information - through a phenomenological model - on the width of the intermixing region is presented and discussed. (literal)
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