Strain sensing on steel surfaces using vacuum packaged MEMS resonators (Articolo in rivista)

Type

• Prodotto della ricerca (Classe)
• Articolo in rivista (Classe)

Label

• Strain sensing on steel surfaces using vacuum packaged MEMS resonators (Articolo in rivista) (literal)

Anno

• 2010-01-01T00:00:00+01:00 (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#doi

• 10.1016/j.proeng.2010.09.383 (literal)

Alternative label

• Ferri M; Mancarella F; Belsito L; Roncaglia A; Yan J; Seshia A. A; Soga K; Zalesky J; (2010)
  Strain sensing on steel surfaces using vacuum packaged MEMS resonators
  in Procedia engineering
  (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori

• Ferri M; Mancarella F; Belsito L; Roncaglia A; Yan J; Seshia A. A; Soga K; Zalesky J; (literal)

Pagina inizio

• 1426 (literal)

Pagina fine

• 1429 (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#url

• http://www.sciencedirect.com/science/article/pii/S1877705810009306 (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume

• 5 (literal)

Rivista

• Procedia engineering (Rivista)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#pagineTotali

• 4 (literal)

Note

• Scopu (literal)
• ISI Web of Science (WOS) (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni

• CNR IMM, I-40129 Bologna, Italy; University of Cambridge, Department of Engineering, Cambridge CB2 1PZ, UK; Czech Technical University in Prague, Faculty of Civil Engineering, Prague 16629, Czech Republic (literal)

Titolo

• Strain sensing on steel surfaces using vacuum packaged MEMS resonators (literal)

Abstract

• The paper presents a technology for strain sensing on steel using resonant MEMS packaged in vacuum. For this purpose, a custom sensor fabrication technology and a novel vacuum packaging technique have been developed. The MEMS sensors have been fabricated by surface micromachining of thick (15 ?m) Silicon On Insulator substrates with heavily doped handle layers (rho = 0.005 ? cm). Using this process, Double-Ended Tuning Fork (DETF) parallel-plate resonators with reduced coupling gaps (less than 1 ?m) have been fabricated, using a high-performance Deep Reactive Ion Etching performed on submicrometer features realized by near-UV lithography combined with a maskless line narrowing technique. The devices have been bonded to a thin steel bar by epoxy glue, packaged in vacuum and tested by applying strain to the bar, showing good tolerances to packaging parasitics, measurement reversibility, and strain sensitivity of 10 Hz/?strain (literal)

Prodotto di

• Institute for microelectronics and microsystems (IMM) (Istituto)
• Studio e sviluppo di microsistemi per analisi chimica (MD.P05.013.001) (Modulo)

Autore CNR

• FULVIO MANCARELLA (Unità di personale interno)
• MATTEO FERRI (Persona)
• LUCA BELSITO (Unità di personale esterno)
• ALBERTO RONCAGLIA (Persona)

Incoming links:

Prodotto

• Institute for microelectronics and microsystems (IMM) (Istituto)
• Studio e sviluppo di microsistemi per analisi chimica (MD.P05.013.001) (Modulo)

Autore CNR di

• LUCA BELSITO (Unità di personale esterno)
• ALBERTO RONCAGLIA (Persona)
• MATTEO FERRI (Persona)
• FULVIO MANCARELLA (Unità di personale interno)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#rivistaDi

• Procedia engineering (Rivista)