Spectroscopic ellipsometry study of hydrogenated amorphous silicon carbon alloy films deposited by PECVD (Articolo in rivista)

Type
Label
  • Spectroscopic ellipsometry study of hydrogenated amorphous silicon carbon alloy films deposited by PECVD (Articolo in rivista) (literal)
Anno
  • 2010-01-01T00:00:00+01:00 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#doi
  • 10.1063/1.3277016 (literal)
Alternative label
  • D.K. Basa; G. Abbate; G. Ambrosone; U.Coscia; A. Marino (2010)
    Spectroscopic ellipsometry study of hydrogenated amorphous silicon carbon alloy films deposited by PECVD
    in Journal of applied physics
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • D.K. Basa; G. Abbate; G. Ambrosone; U.Coscia; A. Marino (literal)
Pagina inizio
  • 023502/1 (literal)
Pagina fine
  • 023502/6 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume
  • 107 (literal)
Rivista
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  • 6 (literal)
Note
  • ISI Web of Science (WOS) (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
  • [D.K. Basa] Department of Physics, Utkal University, Bhubaneswar, India [G. Abbate, G. Ambrosone, U. Coscia] Dipartimento di Scienze Fisiche, Complesso Universitario MSA, via Cintia, 80126 Napoli, Italy [G. Abbate, G. Ambrosone, A. Marino] CNR-INFM CRS-Coherentia, Complesso Universitario MSA, via Cintia, 80126 Napoli, Italy [u. Coscia] CNISM Unità di Napoli, Complesso Universitario MSA, via Cintia, 80126 Napoli, Italy CNR-INFM CRS-Coherentia, Complesso Universitario MSA, via Cintia, 80126 Napoli, Italy (literal)
Titolo
  • Spectroscopic ellipsometry study of hydrogenated amorphous silicon carbon alloy films deposited by PECVD (literal)
Abstract
  • The optical properties of the hydrogenated amorphous silicon carbon alloy films, prepared by plasma enhanced chemical vapor deposition technique from silane and methane gas mixture diluted in helium, have been investigated using variable angle spectroscopic ellipsometry in the photon energy range from 0.73 to 4.59 eV. Tauc-Lorentz model has been employed for the analysis of the optical spectra and it has been demonstrated that the model parameters are correlated with the carbon content as well as to the structural properties of the studied films. (literal)
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