Backscattered electron imaging and scanning transmission electron microscopy imaging of multi-layers (Articolo in rivista)

Type

• Articolo in rivista (Classe)
• Prodotto della ricerca (Classe)

Label

• Backscattered electron imaging and scanning transmission electron microscopy imaging of multi-layers (Articolo in rivista) (literal)

Anno

• 2003-01-01T00:00:00+01:00 (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#doi

• 10.1016/S0304-3991(02)00217-6 (literal)

Alternative label

• Merli, PG; Morandi, V; Corticelli, F (2003)
  Backscattered electron imaging and scanning transmission electron microscopy imaging of multi-layers
  in Ultramicroscopy (Amst.); North Holland Pub. Co., Amsterdam (Paesi Bassi)
  (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori

• Merli, PG; Morandi, V; Corticelli, F (literal)

Pagina inizio

• 89 (literal)

Pagina fine

• 98 (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume

• 94 (literal)

Rivista

• Ultramicroscopy (Rivista)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#pagineTotali

• 10 (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroFascicolo

• 2 (literal)

Note

• ISI Web of Science (WOS) (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni

• CNR, IMM Sez Bologna, Area Ricerca Bologna, I-40129 Bologna, Italy (literal)

Titolo

• Backscattered electron imaging and scanning transmission electron microscopy imaging of multi-layers (literal)

Abstract

• Experimental and theoretical results on image contrast of. semiconductor multi-layers in scanning electron microscopy investigation are reported. Two imaging modes have been considered: backscattered electron imaging of bulk specimen and scanning transmission imaging of thinned specimens. The following main results have been reached. The image resolution of the multi-layers is, in both cases, defined by the probe size. The contrast, governed by density and atomic number differences, is affected by the size of the interaction volume in backscattered electron imaging and by the beam broadening in scanning transmission. Operating in the scanning transmission mode, the contrast of bright field images can be easily related to local variation in atomic number and density of the specimen while the dark field image contrast is strongly affected by electron beam energy, detector collection angles and specimen thickness. All these factors are able to produce contrast reversals that are difficult to explain without the support of a suitable simulation code (literal)

Editore

• North Holland Pub. Co. (Editore)

Prodotto di

• Sviluppo di Modelli Fisici, Simulazioni e Tecniche di Caratterizzazione per le Nanoscienze (MD.P05.004.001) (Modulo)
• Institute for microelectronics and microsystems (IMM) (Istituto)

Autore CNR

• FRANCO CORTICELLI (Unità di personale interno)
• VITTORIO MORANDI (Persona)
• PIER GIORGIO MERLI (Persona)

Insieme di parole chiave

• Keywords of "Backscattered electron imaging and scanning transmission electron microscopy imaging of multi-layers" (Insieme di parole chiave)

Incoming links:

Prodotto

• Institute for microelectronics and microsystems (IMM) (Istituto)
• Sviluppo di Modelli Fisici, Simulazioni e Tecniche di Caratterizzazione per le Nanoscienze (MD.P05.004.001) (Modulo)

Autore CNR di

• FRANCO CORTICELLI (Unità di personale interno)
• VITTORIO MORANDI (Persona)
• PIER GIORGIO MERLI (Persona)

Editore di

• North Holland Pub. Co. (Editore)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#rivistaDi

• Ultramicroscopy (Rivista)

Insieme di parole chiave di

• Keywords of "Backscattered electron imaging and scanning transmission electron microscopy imaging of multi-layers" (Insieme di parole chiave)