Silicon laterally resonant microcantilevers for absolute pressure measurement with integrated actuation and readout (Articolo in rivista)

Type
Label
  • Silicon laterally resonant microcantilevers for absolute pressure measurement with integrated actuation and readout (Articolo in rivista) (literal)
Anno
  • 2008-01-01T00:00:00+01:00 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#doi
  • 10.1116/1.2870221 (literal)
Alternative label
  • Cocuzza M. a; Ferrante I. a; Ricci A. a; Giuri E. a; Scaltrito L. a; Bich D. b; Merialdo A. b; Schina P. b; Correale R. c (2008)
    Silicon laterally resonant microcantilevers for absolute pressure measurement with integrated actuation and readout
    in Journal of vacuum science & technology. B, Microelectronics and nanometer structures; American Vacuum Society, American Institute Of Physics, Melville (Stati Uniti d'America)
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • Cocuzza M. a; Ferrante I. a; Ricci A. a; Giuri E. a; Scaltrito L. a; Bich D. b; Merialdo A. b; Schina P. b; Correale R. c (literal)
Pagina inizio
  • 541 (literal)
Pagina fine
  • 550 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume
  • 26 (literal)
Rivista
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroFascicolo
  • 2 (literal)
Note
  • Scopu (literal)
  • ISI Web of Science (WOS) (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
  • a ChiLab, Materials and Microsystems Laboratory, Polytechnic of Turin, Lungo Piazza D'Armi 6, 10034 Chivasso, Turin, Italy; b Olivetti I-Jet, Loc. Le Vieux, 11020 Arnad, Aosta, Italy; c Varian S.p.A., Via Fratelli Varian 54, 10040 Leinì, Turin, Italy (literal)
Titolo
  • Silicon laterally resonant microcantilevers for absolute pressure measurement with integrated actuation and readout (literal)
Abstract
  • This work is focused on the design, fabrication, and characterization of silicon laterally resonant microcantilevers for measuring absolute pressure. The authors have demonstrated the integration of resonance electrostatic actuation and capacitive readout with a microstructure based on a couple of electrodes and an external amplifier. The microcantilevers have been fabricated with a standard silicon on insulator micromachining process. The characterization method is based on measuring the current at the third harmonic of the excitation frequency flowing through the time-varying cantilever-based capacitor. The variation in resonance response of microcantilevers has been investigated as a function of pressure ?10-2-105 Pa?, both in terms of resonance frequency and quality factor. Theoretical models and experimental data show very good agreement. The microstructure behavior demonstrates the feasibility of an absolute pressure sensor working over a six-decade range with integrated electrical actuation and readout. (literal)
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