Silicon resonant microcantilevers for absolute pressure measurement (Articolo in rivista)

Type
Label
  • Silicon resonant microcantilevers for absolute pressure measurement (Articolo in rivista) (literal)
Anno
  • 2006-01-01T00:00:00+01:00 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#doi
  • 10.1116/1.2214698 (literal)
Alternative label
  • Bianco S. a; Cocuzza M. a; Ferrero S. a; Giuri E. a; Piacenza G. a; Pirri C.F. a; Ricci A. a; Scaltrito L. a; Bich D. b; Merialdo A. b; Schina P. b; Correale R. c (2006)
    Silicon resonant microcantilevers for absolute pressure measurement
    in Journal of vacuum science & technology. B, Microelectronics and nanometer structures; American Vacuum Society, American Institute Of Physics, Melville (Stati Uniti d'America)
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • Bianco S. a; Cocuzza M. a; Ferrero S. a; Giuri E. a; Piacenza G. a; Pirri C.F. a; Ricci A. a; Scaltrito L. a; Bich D. b; Merialdo A. b; Schina P. b; Correale R. c (literal)
Pagina inizio
  • 1803 (literal)
Pagina fine
  • 1809 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume
  • 24 (literal)
Rivista
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroFascicolo
  • 4 (literal)
Note
  • ISI Web of Science (WOS) (literal)
  • Scopu (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
  • a Lab, Materials and Microsystems Laboratory, Polytechnic of Turin, Lungo Piazza D'Armi 6, Chivasso, Turin 10034, Italy; b Olivetti I-Jet, Locality le Vieux, Amad, 11020 Aosta, Italy; c Varian SpA, Via Fratelli Varian 54, Leini, 10040 Turin, Italy (literal)
Titolo
  • Silicon resonant microcantilevers for absolute pressure measurement (literal)
Abstract
  • This work is focused on the developing of silicon resonant microcantilevers for the measurement of the absolute pressure. The microcantilevers have been fabricated with a two-mask bulk micromachining process. The variation in resonance response of microcantilevers was investigated as a function of pressure ?10-1-105 Pa?, both in terms of resonance frequency and quality factor. A theoretical description of the resonating microstructure is given according to different molecular and viscous regimes. Also a brief discussion on the different quality factors contributions is presented. Theoretical and experimental data show a very satisfying agreement. The microstructure behavior demonstrates a certain sensitivity over a six decade range and the potential evolution of an absolute pressure sensor working in the same range. (literal)
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