Role of C and Ge in the electrical activation of In implanted in Silicon. (Contributo in atti di convegno)

Type
Label
  • Role of C and Ge in the electrical activation of In implanted in Silicon. (Contributo in atti di convegno) (literal)
Anno
  • 2004-01-01T00:00:00+01:00 (literal)
Alternative label
  • S. Scalese, V. Privitera, M. Italia, A. La Magna, P. Alippi, L. Renna (2004)
    Role of C and Ge in the electrical activation of In implanted in Silicon.
    in Symposium on Silicon Front-End Junction Formation-Physics and Technology held at the 2004 MRS Spring Meeting, S. Francisco (USA), 13-15 Aprile 2004
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • S. Scalese, V. Privitera, M. Italia, A. La Magna, P. Alippi, L. Renna (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#titoloVolume
  • SILICON FRONT-END JUNCTION FORMATION-PHYSICS AND TECHNOLOGY (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#volumeInCollana
  • 810 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
  • CNR-IMM, Catania (Italy) ST-Microelectronics, Catania (Italy) (literal)
Titolo
  • Role of C and Ge in the electrical activation of In implanted in Silicon. (literal)
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