Structural, morphological and acoustic properties of AlN thick films sputtered on Si(001) and Si(111) substrates at low temperature (Articolo in rivista)

Type

• Articolo in rivista (Classe)
• Prodotto della ricerca (Classe)

Label

• Structural, morphological and acoustic properties of AlN thick films sputtered on Si(001) and Si(111) substrates at low temperature (Articolo in rivista) (literal)

Anno

• 2003-01-01T00:00:00+01:00 (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#doi

• 10.1016/S0040-6090(03)00911-8 (literal)

Alternative label

• Caliendo C.*, Imperatori P.**, Cianci E.*** (2003)
  Structural, morphological and acoustic properties of AlN thick films sputtered on Si(001) and Si(111) substrates at low temperature
  in Thin solid films (Print); Elsevier Sequoia, Lausanne (Svizzera)
  (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori

• Caliendo C.*, Imperatori P.**, Cianci E.*** (literal)

Pagina inizio

• 32 (literal)

Pagina fine

• 37 (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#url

• http://www.sciencedirect.com/science/article/pii/S0040609003009118 (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume

• 441 (literal)

Rivista

• Thin solid films (Rivista)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#note

• Impact factor=1.443 (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroFascicolo

• 1-2 (literal)

Note

• ISI Web of Science (WOS) (literal)
• SCImago (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni

• * IDAC-CNR ** ISM-CNR Montelibrtetti *** IFN-CNR Roma (literal)

Titolo

• Structural, morphological and acoustic properties of AlN thick films sputtered on Si(001) and Si(111) substrates at low temperature (literal)

Abstract

• Polycrystalline AlN thick films were deposited on Si(100) and Si(111) substrates by reactive radio frequency sputtering technique at low temperature. The structure and the morphology of the films were investigated by X-ray diffraction, scanning electron microscopy and atomic force microscopy techniques. These measurements showed that the AlN films were highly c-axis oriented, with low surface roughness. The surface acoustic wave (SAW) properties of the films were investigated: a mean value of 3.8×10-12 C/N was estimated for the piezoelectric strain constant d33; the phase velocities of SAW’s propagating in polycrystalline AlN/Si structures, for different film thicknesses, were calculated and found to be in good agreement with the theoretical velocities evaluated for SAW’s propagating in single crystal AlN/Si structures. (literal)

Editore

• Elsevier Sequoia (Editore)

Prodotto di

• Institute of Acoustics and Sensors \"Orso Mario Corbino\" (IDASC) (Istituto)
• Istituto di fotonica e nanotecnologie (IFN) (Istituto)
• Institute of structure of matter (ISM) (Istituto)

Autore CNR

• CINZIA CALIENDO (Persona)
• PATRIZIA IMPERATORI (Unità di personale interno)

Incoming links:

Autore CNR di

• CINZIA CALIENDO (Persona)
• PATRIZIA IMPERATORI (Unità di personale interno)

Prodotto

• Istituto di fotonica e nanotecnologie (IFN) (Istituto)
• Institute of structure of matter (ISM) (Istituto)
• Institute of Acoustics and Sensors \"Orso Mario Corbino\" (IDASC) (Istituto)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#rivistaDi

• Thin solid films (Rivista)

Editore di

• Elsevier Sequoia (Editore)