Conduction and Charging Mechanisms in Ta2O5 Thin Films for Application in Capacitive RF MEMS Switches (Abstract/Poster in atti di convegno)

Type
Label
  • Conduction and Charging Mechanisms in Ta2O5 Thin Films for Application in Capacitive RF MEMS Switches (Abstract/Poster in atti di convegno) (literal)
Anno
  • 2010-01-01T00:00:00+01:00 (literal)
Alternative label
  • Persano A, Quaranta F, Martucci MC, Cretì P, Taurino A, Siciliano P, Cola A (2010)
    Conduction and Charging Mechanisms in Ta2O5 Thin Films for Application in Capacitive RF MEMS Switches
    in MEMSWAVE & MEMS IN ITALY, Otranto, 30 June-1 July 2010
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • Persano A, Quaranta F, Martucci MC, Cretì P, Taurino A, Siciliano P, Cola A (literal)
Pagina inizio
  • 28 (literal)
Pagina fine
  • 29 (literal)
Note
  • Abstract (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
  • CNR-IMM Lecce (literal)
Titolo
  • Conduction and Charging Mechanisms in Ta2O5 Thin Films for Application in Capacitive RF MEMS Switches (literal)
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