Riboon-like structures in films deposited by means of modulated C2F4 plasmas: gas and surface diagnostics (Abstract/Poster in atti di convegno)

Type
Label
  • Riboon-like structures in films deposited by means of modulated C2F4 plasmas: gas and surface diagnostics (Abstract/Poster in atti di convegno) (literal)
Anno
  • 2003-01-01T00:00:00+01:00 (literal)
Alternative label
  • F. Palumbo, A. Milella, P. Favia, G. Cicala, R. d'Agostino (2003)
    Riboon-like structures in films deposited by means of modulated C2F4 plasmas: gas and surface diagnostics
    in Proceedings of Frontiers in Low Temperature Plasma Diagnostics V (FLTPD-V) p. 275, April 2003, Specchia
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • F. Palumbo, A. Milella, P. Favia, G. Cicala, R. d'Agostino (literal)
Titolo
  • Riboon-like structures in films deposited by means of modulated C2F4 plasmas: gas and surface diagnostics (literal)
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