Growth and Characterization of 3C-SiC Films for Micro Electro Mechanical Systems (MEMS) Applications (Articolo in rivista)

Type
Label
  • Growth and Characterization of 3C-SiC Films for Micro Electro Mechanical Systems (MEMS) Applications (Articolo in rivista) (literal)
Anno
  • 2009-01-01T00:00:00+01:00 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#doi
  • 10.1021/cg900677c (literal)
Alternative label
  • Bosi M.; Watts B. E.; Attolini G.; Ferrari C.; Frigeri C.; Salviati G.; Poggi A.; Mancarella F.; Roncaglia A.; Martinez Sacristan O.; Hortelano V. (2009)
    Growth and Characterization of 3C-SiC Films for Micro Electro Mechanical Systems (MEMS) Applications
    in Crystal growth & design; ACS, American chemical society, Washington, DC (Stati Uniti d'America)
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • Bosi M.; Watts B. E.; Attolini G.; Ferrari C.; Frigeri C.; Salviati G.; Poggi A.; Mancarella F.; Roncaglia A.; Martinez Sacristan O.; Hortelano V. (literal)
Pagina inizio
  • 4852 (literal)
Pagina fine
  • 4859 (literal)
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  • http://pubs.acs.org/doi/abs/10.1021/cg900677c (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume
  • 9 (literal)
Rivista
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#note
  • In: Crystal Growth & Design, vol. 9 (11) pp. 4852 - 4859. American Chemical Society, 2009. (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroFascicolo
  • 11 (literal)
Note
  • Scopu (literal)
  • Google Scholar (literal)
  • ISI Web of Science (WOS) (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
  • 1. IMEM CNR Inst, I-43100 Parma, Italy 2. IMM CNR Inst, Area Ric Bologna, I-40129 Bologna, Italy 3. Univ Valladolid, Dept Fis Mat Condensada, Optronlab Grp, E-47011 Valladolid, Spain (literal)
Titolo
  • Growth and Characterization of 3C-SiC Films for Micro Electro Mechanical Systems (MEMS) Applications (literal)
Abstract
  • The growth of 3C-SiC on (001) silicon substrates by means of vapor phase epitaxy is described. The growth mechanisms are discussed with the aid of structural and morphological characterizations performed by X-ray diffraction, transmission electron microscopy, and atomic force microscopy. Raman spectroscopy was used to study the residual stress. A large shift of Raman peaks with respect to the expected values for the bulk is observed and explained by the relaxation of Raman selection rules due to lattice defects. The stress and stress gradients through the film thickness are observed and studied on micrometer-sized structures such as membranes and cantilevers. Local Raman peak fluctuations are observed on millimetersized membranes, while cantilevers show different degrees of curling depending on film thickness. (literal)
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