Focused ion beam as tool for atomic force microscope (AFM) probes sculpturing (Contributo in atti di convegno)

Type

• Prodotto della ricerca (Classe)
• Contributo in atti di convegno (Classe)

Label

• Focused ion beam as tool for atomic force microscope (AFM) probes sculpturing (Contributo in atti di convegno) (literal)

Anno

• 2008-01-01T00:00:00+01:00 (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#doi

• 10.1088/1742-6596/126/1/012070 (literal)

Alternative label

• C. Menozzi, L. Calabri, P. Facci, P. Pingue, F. Dinelli, P. Baschieri (2008)
  Focused ion beam as tool for atomic force microscope (AFM) probes sculpturing
  in Electron Microscopy and Analysis Group Conference, Glasgow Caledonian Univ, Glasgow, 3-7 September 2007
  (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori

• C. Menozzi, L. Calabri, P. Facci, P. Pingue, F. Dinelli, P. Baschieri (literal)

Pagina inizio

• 012070-1 (literal)

Pagina fine

• 012070-4 (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#titoloVolume

• Electron Microscopy and Analysis Group Conference 2007 (EMAG 2007) (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#volumeInCollana

• 126 (literal)

Note

• ISI Web of Science (WOS) (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni

• 1. CNR, INFM, S3, I-41100 Modena, Italy (literal)

Titolo

• Focused ion beam as tool for atomic force microscope (AFM) probes sculpturing (literal)

Abstract

• The fabrication of novel atomic force microscopy (AFM) probes for nanoindentation and nanoimprint lithography (NIL) is presented. Nanomachining induced by focused ion beam (FIB) were employed in order to modify the original tip shape of commercial silicon AFM probes. The FIB-modified probes are used both to perform experiments as to image the corresponding tip-induced surface modifications. With this approach, a relationship between the hardness of a material and the shape of the indenter has been found in the nanoindentation application, and we have obtained information related to the force acting on the mold during its detaching from the polymer film in the AFM-NIL application. (literal)

Prodotto di

• Processi molecolari e nanolavorazione (MD.P06.003.001) (Modulo)
• Istituto per i processi chimico-fisici (IPCF) (Istituto)

Autore CNR

• FRANCO DINELLI (Unità di personale interno)
• PAOLO BASCHIERI (Unità di personale interno)

Incoming links:

Prodotto

• Istituto per i processi chimico-fisici (IPCF) (Istituto)
• Processi molecolari e nanolavorazione (MD.P06.003.001) (Modulo)

Autore CNR di

• FRANCO DINELLI (Unità di personale interno)
• PAOLO BASCHIERI (Unità di personale interno)