Electrical stability in self-aligned p-channel polysilicon Thin Film Transistors (Articolo in rivista)

Type
Label
  • Electrical stability in self-aligned p-channel polysilicon Thin Film Transistors (Articolo in rivista) (literal)
Anno
  • 2007-01-01T00:00:00+01:00 (literal)
Alternative label
  • P. Gaucci, L. Mariucci, A. Valletta, A. Pecora and G. Fortunato, F. Templier (2007)
    Electrical stability in self-aligned p-channel polysilicon Thin Film Transistors
    in Thin solid films (Print)
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • P. Gaucci, L. Mariucci, A. Valletta, A. Pecora and G. Fortunato, F. Templier (literal)
Pagina inizio
  • 7571 (literal)
Pagina fine
  • 7575 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume
  • 515 (literal)
Rivista
Note
  • ISI Web of Science (WOS) (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
  • 1. CNR, IMM, I-00156 Rome, Italy 2. CEA, LETS, Dept IHS, F-38054 Grenoble, France (literal)
Titolo
  • Electrical stability in self-aligned p-channel polysilicon Thin Film Transistors (literal)
Abstract
  • In this work we present a study of the electrical stability of self-aligned p-channel thin film transitor fabricated using excimer laser annealing. The electrical stability was tested performing different bias-temperature stress experiments and we found an increased degradation in devices with large channel width and also for increasing temperatures in the bias-temperature stress performed at zero drain voltage. These results clearly point out to instabilities related to self-heating effects of the devices, showing a substantial increase of the threshold voltage and degradation of the subthreshold region, as well as a transconductance (G) increase. From extensive analysis of the phenomenon through numerical simulations, we found that the bias-temperature-stress effects, including G,, overshoot, could be perfectly reproduced assuming that degradation is confined in a narrow channel region near the source and/or drain contacts. From the present results we conclude that self-heating triggers some degradation of a spatially limited region of the channel, presumably related to residual damage of the ion-implantation process. (literal)
Prodotto di
Autore CNR

Incoming links:


Autore CNR di
Prodotto
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#rivistaDi
data.CNR.it