http://www.cnr.it/ontology/cnr/individuo/prodotto/ID169686
Electrical stability in self-aligned p-channel polysilicon Thin Film Transistors (Articolo in rivista)
- Type
- Label
- Electrical stability in self-aligned p-channel polysilicon Thin Film Transistors (Articolo in rivista) (literal)
- Anno
- 2007-01-01T00:00:00+01:00 (literal)
- Alternative label
P. Gaucci, L. Mariucci, A. Valletta, A. Pecora and G. Fortunato, F. Templier (2007)
Electrical stability in self-aligned p-channel polysilicon Thin Film Transistors
in Thin solid films (Print)
(literal)
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- P. Gaucci, L. Mariucci, A. Valletta, A. Pecora and G. Fortunato, F. Templier (literal)
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- Rivista
- Note
- ISI Web of Science (WOS) (literal)
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
- 1. CNR, IMM, I-00156 Rome, Italy
2. CEA, LETS, Dept IHS, F-38054 Grenoble, France (literal)
- Titolo
- Electrical stability in self-aligned p-channel polysilicon Thin Film Transistors (literal)
- Abstract
- In this work we present a study of the electrical stability of self-aligned p-channel thin film transitor fabricated using excimer laser annealing. The electrical stability was tested performing different bias-temperature stress experiments and we found an increased degradation in devices with large channel width and also for increasing temperatures in the bias-temperature stress performed at zero drain voltage. These results clearly point out to instabilities related to self-heating effects of the devices, showing a substantial increase of the threshold voltage and degradation of the subthreshold region, as well as a transconductance (G) increase. From extensive analysis of the phenomenon through numerical simulations, we found that the bias-temperature-stress effects, including G,, overshoot, could be perfectly reproduced assuming that degradation is confined in a narrow channel region near the source and/or drain contacts. From the present results we conclude that self-heating triggers some degradation of a spatially limited region of the channel, presumably related to residual damage of the ion-implantation process. (literal)
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