Damage and recovery in boron doped SOI layers after high energy implantation (Contributo in atti di convegno)

Type
Label
  • Damage and recovery in boron doped SOI layers after high energy implantation (Contributo in atti di convegno) (literal)
Anno
  • 2005-01-01T00:00:00+01:00 (literal)
Alternative label
  • Ferri M, Solmi S, Armigliato A, Nobili D and Passini M (2005)
    Damage and recovery in boron doped SOI layers after high energy implantation
    in MMDmeeting - June 22th-25th, 2005 Genova (Italy), Genova (GE)
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • Ferri M, Solmi S, Armigliato A, Nobili D and Passini M (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
  • Institute of Microelectronics and Microsystems CNR-IMM Bologna, Italy (literal)
Titolo
  • Damage and recovery in boron doped SOI layers after high energy implantation (literal)
Prodotto di
Autore CNR

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Autore CNR di
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