Reproducibility in X-ray reflectometry: results from the first world-wide round-robin experiment (Articolo in rivista)

Type
Label
  • Reproducibility in X-ray reflectometry: results from the first world-wide round-robin experiment (Articolo in rivista) (literal)
Anno
  • 2008-01-01T00:00:00+01:00 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#doi
  • 10.1107/S0021889807051904 (literal)
Alternative label
  • Colombi, P; Agnihotri, DK; Asadchikov, VE; Bontempi, E; Bowen, DK; Chang, CH; Depero, LE; Farnworth, M; Fujimoto, T; Gibaud, A; Jergel, M; Krumrey, M; Lafford, TA; Lamperti, A; Ma, T; Matyi, RJ; Meduna, M; Milita, S; Sakurai, K; Shabel'nikov, L; Ulyanenko; A. Van der Lee and C. Wiemer (2008)
    Reproducibility in X-ray reflectometry: results from the first world-wide round-robin experiment
    in Journal of applied crystallography
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • Colombi, P; Agnihotri, DK; Asadchikov, VE; Bontempi, E; Bowen, DK; Chang, CH; Depero, LE; Farnworth, M; Fujimoto, T; Gibaud, A; Jergel, M; Krumrey, M; Lafford, TA; Lamperti, A; Ma, T; Matyi, RJ; Meduna, M; Milita, S; Sakurai, K; Shabel'nikov, L; Ulyanenko; A. Van der Lee and C. Wiemer (literal)
Pagina inizio
  • 143 (literal)
Pagina fine
  • 152 (literal)
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  • The paper has be chosen for IUCr newsletter publication in 2008- (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume
  • 41 (literal)
Rivista
Note
  • ISI Web of Science (WOS) (literal)
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  • \"[Colombi, P.; Bontempi, E.; Depero, L. E.] Univ Brescia, Tech Chem Lab, Brescia, Italy; [Asadchikov, V. E.] Russian Acad Sci, Xray Reflect Inst Crystallog, Moscow 117901, Russia; [Farnworth, M.] Pilkington European Tech Ctr, Lathom, England; [Fujimoto, T.] AIST, NMII, Surface & Thin Film Standards Sect, Tsukuba, Ibaraki, Japan; [Jergel, M.] Inst Phys SAS, Bratislava, Slovakia; [Krumrey, M.] Phys Tech Bundesanstalt, Berlin, Germany; [Lamperti, A.] Univ Durham, Dept Phys, Durham DH1 3HP, England; [Matyi, R. J.] SUNY Albany, Coll Nanoscale Sci & Engn, Albany, NY 12222 USA; [Meduna, M.] Masaryk Univ, Dept Phys Mat Condensee, Brno, Czech Republic; [Milita, S.] CNR IMM, Bologna, Italy; [Sakurai, K.] Natl Inst Mat Sci, Tsukuba, Ibaraki 3050047, Japan; [Shabel'nikov, L.] RAS, Inst Microelect Technol, Moscow, Russia; [Ulyanenkov, A.] Bruker AXS GmbH, Res Dept, Karlsruhe, Germany; [Van der Lee, A.] Univ Montpellier 2, Inst Europeen Membranes, UMR 5635, F-34095 Montpellier 5, France; [Wiemer, C.] CNR, INFM, Lab MDM, Agrate Brianza, Italy (literal)
Titolo
  • Reproducibility in X-ray reflectometry: results from the first world-wide round-robin experiment (literal)
Abstract
  • X-ray reflectometry (XRR) is a well established technique to evaluate quantitatively electron density, thickness and roughness of thin layers. In this paper, results of the first world-wide XRR round-robin experiment, involving 20 laboratories, are presented and discussed. The round-robin experiment was performed within the framework of the VAMAS Project 'X-ray reflectivity measurements for evaluation of thin films and multilayers', the aim of which is to produce a 'good practice' manual for XRR. The reproducibility of measurements obtained using different equipment has been investigated. The influence of the fitting of the experimental data was shown to be non-negligible compared with the experimental factors. The dynamic intensity range proves to be an important parameter for obtaining a good quality measurement. A simpler test sample which does not develop a surface oxide layer over time is now the subject of a follow-up study. (literal)
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