Evolution of boron-interstitial clusters in crystalline Si studied by transmission electron microscopy (Articolo in rivista)

Type
Label
  • Evolution of boron-interstitial clusters in crystalline Si studied by transmission electron microscopy (Articolo in rivista) (literal)
Anno
  • 2007-01-01T00:00:00+01:00 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#doi
  • 10.1063/1.2757145 (literal)
Alternative label
  • Boninelli, S(1); Mirabella, S(1); Bruno, E(1); Priolo, F(1); Cristiano, F(2); Claverie, A(2); De Salvador, D(3); Bisognin, G(3); Napolitani, E(3) (2007)
    Evolution of boron-interstitial clusters in crystalline Si studied by transmission electron microscopy
    in Applied physics letters; American Institute Of Physics (AIP), Melville (Stati Uniti d'America)
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • Boninelli, S(1); Mirabella, S(1); Bruno, E(1); Priolo, F(1); Cristiano, F(2); Claverie, A(2); De Salvador, D(3); Bisognin, G(3); Napolitani, E(3) (literal)
Pagina inizio
  • 031905 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume
  • 91 (literal)
Rivista
Note
  • ISI Web of Science (WOS) (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
  • (1)Univ Catania, Dipartimento Fis Astron, CNR, INFM,MATIS, I-95123 Catania, Italy; (2)CNRS, LAAS, F-31077 Toulouse, France; CNRS, CEMES, F-31055 Toulouse, France (3)Univ Padova, Dipartimento Fisica, CNR, INFM,MATIS, I-35131 Padova, Italy; (literal)
Titolo
  • Evolution of boron-interstitial clusters in crystalline Si studied by transmission electron microscopy (literal)
Abstract
  • The thermal evolution of large boron-interstitials clusters (BICs) in crystalline Si has been studied by transmission electron microscopy (TEM). After ion implantation (20 keV and 1x10(14) Si/cm(2)) and annealing (815 degrees C and 5 min), large clusters (6-8 nm) have been observed in correspondence of a narrow, highly doped Si:B layer (2x10(20) B/cm(3)). Under prolonged annealing, such clusters dissolve, progressively shrinking their mean size below the TEM detection limit. The time evolution of such a BIC shrinking is fully compatible with the slow path dissolution kinetics recently published. These data suggest the identification of the slow dissolving BICs with the large observed clusters. (C) 2007 American Institute of Physics. (literal)
Editore
Prodotto di
Autore CNR
Insieme di parole chiave

Incoming links:


Autore CNR di
Prodotto
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#rivistaDi
Editore di
Insieme di parole chiave di
data.CNR.it