http://www.cnr.it/ontology/cnr/individuo/prodotto/ID166876

Demonstration of an electrostatic-shielded cantilever (Articolo in rivista)

Type

Label

Demonstration of an electrostatic-shielded cantilever (Articolo in rivista) (literal)

Anno

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#doi

Alternative label

Pingue, P; Piazza, V; Baschieri, P; Ascoli, C; Menozzi, C; Alessandrini, A; Facci, P (2006)
Demonstration of an electrostatic-shielded cantilever
in Applied physics letters
(literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori

Pingue, P; Piazza, V; Baschieri, P; Ascoli, C; Menozzi, C; Alessandrini, A; Facci, P (literal)

Pagina inizio

Pagina fine

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Rivista

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Note

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni

CNR, INFM, NEST, I-56100 Pisa, Italy; Scuola Normale Super Pisa, I-56100 Pisa, Italy; IPCF, I-56100 Pisa, Italy; CNR, INFM, S3, I-41100 Modena, Italy (literal)

Titolo

Abstract

The fabrication and performances of cantilevered probes with reduced parasitic capacitance starting from a commercial Si3N4 cantilever chip is presented. Nanomachining and metal deposition induced by focused ion beam techniques were employed in order to modify the original insulating pyramidal tip and insert a conducting metallic tip. Two parallel metallic electrodes deposited on the original cantilever arms are employed for tip biasing and as ground plane in order to minimize the electrostatic force due to the capacitive interaction between cantilever and sample surface. Excitation spectra and force-to-distance characterization are shown with different electrode configurations. Applications of this scheme in electrostatic force microscopy, Kelvin probe microscopy and local anodic oxidation is discussed. (c) 2006 American Institute of Physics. (literal)

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