http://www.cnr.it/ontology/cnr/individuo/prodotto/ID1510

Novel fabrication method for three-dimensional nanostructuring: an application to micro-optics (Articolo in rivista)

Type

Label

Novel fabrication method for three-dimensional nanostructuring: an application to micro-optics (Articolo in rivista) (literal)

Anno

Alternative label

Tormen, M; Carpentiero, A; Ferrari, E; Cojoc, D; Fabrizio, E (2007)
Novel fabrication method for three-dimensional nanostructuring: an application to micro-optics
in Nanotechnology (Bristol. Print)
(literal)

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Rivista

Note

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Ist Nazl Fis Mat, TASC Lab, I-34012 Basovizza Trieste, Italy; Univ Trieste, Trieste, Italy; Magna Graecia Univ Catanzaro, Catanzaro, Italy (literal)

Titolo

Novel fabrication method for three-dimensional nanostructuring: an application to micro-optics (literal)

Abstract

We propose a 3D micro and nanofabrication method with potential applications to several nanotechnology-related fields. Our approach is based on the combination of lithographic steps and isotropic wet etchings performed on a quartz or glass substrate to form 3D structures with very accurate shape control and nanometer scale surface roughness. The resulting concavities at the quartz surface are converted into convex plastic elements by hot embossing or casting techniques. Complex all-polymer refractive optical elements have been realized by this method. Upon illumination, such micro-optics focus the light into predetermined 3D distributions of focal lines and spots. The general fabrication scheme explored here is illustrated through a series of examples in optics, but is expected to offer new solutions to other fields such as medicine, microfluidics and nano-optics. (literal)

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