Surface micromechanical process for manufacturing micromachined capacitive ultra-acoustic transducers and relevant micromachined capacitive ultra-acoustic transducer (Brevetto)

Type

• Prodotto della ricerca (Classe)
• Brevetto (Classe)
• Brevetto (Classe)

Label

• Surface micromechanical process for manufacturing micromachined capacitive ultra-acoustic transducers and relevant micromachined capacitive ultra-acoustic transducer (Brevetto) (literal)

Anno

• 2006-01-01T00:00:00+01:00 (literal)

Alternative label

• G. Caliano, A. Caronti, E. Cianci, V. Foglietti, A. Minotti, A. Nencioni, M. Pappalardo (2006)
  Surface micromechanical process for manufacturing micromachined capacitive ultra-acoustic transducers and relevant micromachined capacitive ultra-acoustic transducer
  WO2006092820
  (literal)

Titolo

• Surface micromechanical process for manufacturing micromachined capacitive ultra-acoustic transducers and relevant micromachined capacitive ultra-acoustic transducer (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori

• G. Caliano, A. Caronti, E. Cianci, V. Foglietti, A. Minotti, A. Nencioni, M. Pappalardo (literal)

Numero brevetto

• WO2006092820 (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#note

• international patent WO2006092820 pubblicato il 2006-09-08 (literal)

Anno di deposito

• 2006 (literal)

Titolo

• Surface micromechanical process for manufacturing micromachined capacitive ultra-acoustic transducers and relevant micromachined capacitive ultra-acoustic transducer (literal)

Prodotto di

• NEMS e MEMS (MD.P06.001.003) (Modulo)
• Istituto di fotonica e nanotecnologie (IFN) (Istituto)

Autore CNR

• VITTORIO FOGLIETTI (Persona)
• ELENA CIANCI (Persona)

Incoming links:

Prodotto

• Istituto di fotonica e nanotecnologie (IFN) (Istituto)
• NEMS e MEMS (MD.P06.001.003) (Modulo)

Autore CNR di

• ELENA CIANCI (Persona)
• VITTORIO FOGLIETTI (Persona)