Characterization of a thermal oxidation process on SiC preamorphized by Ar ion implantation (Comunicazione a convegno)

Type
Label
  • Characterization of a thermal oxidation process on SiC preamorphized by Ar ion implantation (Comunicazione a convegno) (literal)
Anno
  • 2003-01-01T00:00:00+01:00 (literal)
Alternative label
  • Poggi A., Nipoti R., Solmi S., Bersani M, Vanzetti L. (2003)
    Characterization of a thermal oxidation process on SiC preamorphized by Ar ion implantation
    in 10th International conference on Silicon carbide and Related Materials, Lione
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • Poggi A., Nipoti R., Solmi S., Bersani M, Vanzetti L. (literal)
Titolo
  • Characterization of a thermal oxidation process on SiC preamorphized by Ar ion implantation (literal)
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