http://www.cnr.it/ontology/cnr/individuo/prodotto/ID114682
Plasma deposition of organosilicon coatings as low-k dielectrics (Abstract/Poster in atti di convegno)
- Type
- Label
- Plasma deposition of organosilicon coatings as low-k dielectrics (Abstract/Poster in atti di convegno) (literal)
- Anno
- 2007-01-01T00:00:00+01:00 (literal)
- Alternative label
A. Milella, G. Aresta, R. dÂ’Agostino, F. Fracassi, F. Palumbo (2007)
Plasma deposition of organosilicon coatings as low-k dielectrics
in 18 th International Symposium on Plasma Chemistry (ISPC-18), Kyoto, Japan
(literal)
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
- A. Milella, G. Aresta, R. dÂ’Agostino, F. Fracassi, F. Palumbo (literal)
- Titolo
- Plasma deposition of organosilicon coatings as low-k dielectrics (literal)
- Prodotto di
- Autore CNR
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