Plasma deposition of organosilicon coatings as low-k dielectrics (Abstract/Poster in atti di convegno)

Type
Label
  • Plasma deposition of organosilicon coatings as low-k dielectrics (Abstract/Poster in atti di convegno) (literal)
Anno
  • 2007-01-01T00:00:00+01:00 (literal)
Alternative label
  • A. Milella, G. Aresta, R. dÂ’Agostino, F. Fracassi, F. Palumbo (2007)
    Plasma deposition of organosilicon coatings as low-k dielectrics
    in 18 th International Symposium on Plasma Chemistry (ISPC-18), Kyoto, Japan
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • A. Milella, G. Aresta, R. dÂ’Agostino, F. Fracassi, F. Palumbo (literal)
Titolo
  • Plasma deposition of organosilicon coatings as low-k dielectrics (literal)
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Autore CNR

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