http://www.cnr.it/ontology/cnr/individuo/prodotto/ID114681
Dimethylaminosilanes plasmas for SiCN films deposition: FT-IR study of plasma and solid phase (Abstract/Poster in atti di convegno)
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- Label
- Dimethylaminosilanes plasmas for SiCN films deposition: FT-IR study of plasma and solid phase (Abstract/Poster in atti di convegno) (literal)
- Anno
- 2007-01-01T00:00:00+01:00 (literal)
- Alternative label
R. Di Mundo, R. dÂ’Agostino, F. Fracassi, F. Palumbo (2007)
Dimethylaminosilanes plasmas for SiCN films deposition: FT-IR study of plasma and solid phase
in 18 th International Symposium on Plasma Chemistry (ISPC-18), Kyoto, Japan
(literal)
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
- R. Di Mundo, R. dÂ’Agostino, F. Fracassi, F. Palumbo (literal)
- Titolo
- Dimethylaminosilanes plasmas for SiCN films deposition: FT-IR study of plasma and solid phase (literal)
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- Autore CNR
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