Dimethylaminosilanes plasmas for SiCN films deposition: FT-IR study of plasma and solid phase (Abstract/Poster in atti di convegno)

Type
Label
  • Dimethylaminosilanes plasmas for SiCN films deposition: FT-IR study of plasma and solid phase (Abstract/Poster in atti di convegno) (literal)
Anno
  • 2007-01-01T00:00:00+01:00 (literal)
Alternative label
  • R. Di Mundo, R. dÂ’Agostino, F. Fracassi, F. Palumbo (2007)
    Dimethylaminosilanes plasmas for SiCN films deposition: FT-IR study of plasma and solid phase
    in 18 th International Symposium on Plasma Chemistry (ISPC-18), Kyoto, Japan
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • R. Di Mundo, R. dÂ’Agostino, F. Fracassi, F. Palumbo (literal)
Titolo
  • Dimethylaminosilanes plasmas for SiCN films deposition: FT-IR study of plasma and solid phase (literal)
Prodotto di
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