http://www.cnr.it/ontology/cnr/individuo/prodotto/ID114259
Mechanical characterization of 3C-SiC grown on Si micromachined cantilever (Abstract/Poster in convegno)
- Type
- Label
- Mechanical characterization of 3C-SiC grown on Si micromachined cantilever (Abstract/Poster in convegno) (literal)
- Anno
- 2010-01-01T00:00:00+01:00 (literal)
- Alternative label
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
- Ricciardi C.; Canavese G.; Castagna R.; Ferrante I.; Marasso S.; Ricci A.; Watts B. E.; Attolini G.; Bosi M.; Nasi L.; Ranzieri P. (literal)
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#note
- In: ECSCRM8th-2010 - 8th European Conference on Silicon Carbide and Related Materials - 2010 (Oslo, 29/08 - 02/09 2010). (literal)
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#descrizioneSinteticaDelProdotto
- Resonating microcantilever (MCs) are extremely sensitive mass detectors that have been successfully proposed as chemical, biological and environmental sensors [1]. However, recent works have demonstrated that variation of flexural rigidity due to localization of molecule absorption can induce a positive frequency shift larger than the negative one due to the added mass effect [2]. Goal of our research is to grown and pattern thin 3C-SiC films on Si MC to obtain a huge local increment of beam stiffness, exploiting the outstanding mechanical properties of such material (in particular, its large Young modulus). (literal)
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
- Department of Materials Science and Chemical Engineering, Politecnico di Torino, Italy, CNR-IMEM, Parma (literal)
- Titolo
- Mechanical characterization of 3C-SiC grown on Si micromachined cantilever (literal)
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