Development and optical characterization of vertical tapers in SION waveguides using gray-scale lithography (Comunicazione a convegno)

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  • Development and optical characterization of vertical tapers in SION waveguides using gray-scale lithography (Comunicazione a convegno) (literal)
Anno
  • 2011-01-01T00:00:00+01:00 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#doi
  • 10.1117/12.886820 (literal)
Alternative label
  • Bing Han, Romain Guider, Eveline Rigo, Silvia Larcheri, Gualtiero Nunzi Conti, Manga Rao Vanacharla, Alessandro Chiasera, Maurizio Ferrari, Lorenzo Pavesi, Georg Pucker, Giancarlo C. Righini, Mher Ghulinyan. (2011)
    Development and optical characterization of vertical tapers in SION waveguides using gray-scale lithography
    in SPIE Microtechnologies, Conference 8069 - Integrated Photonics: Materials, Devices and Applications, Prague, Czech Republic, 18-20 April 2011
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • Bing Han, Romain Guider, Eveline Rigo, Silvia Larcheri, Gualtiero Nunzi Conti, Manga Rao Vanacharla, Alessandro Chiasera, Maurizio Ferrari, Lorenzo Pavesi, Georg Pucker, Giancarlo C. Righini, Mher Ghulinyan. (literal)
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  • 80690K-1 (literal)
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  • 8069 (literal)
Rivista
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  • We describe the development of optical waveguides and adiabatic tapers based on SiON-glasses for a lab-on-chip device with fluorescence optical detection. Sensing is based on evanescent near-field excitation of biomolecules captured on the surface of a thin waveguide. First, the composition of SiON waveguides was optimized to reduce losses for visible light. Waveguides with refractive index of ~1.63 showed propagation losses of ~0.8-0.9 dB/cm at 633 nm. A low loss adiabatic taper was developed to convert efficiently the light from a multi mode waveguide into a thin mono-modal one. Design of the taper was done by calculating numerically the transmission efficiency using a finite-difference time-domain method (FDTD). Simulation results show that losses lower than ~1 dB are obtained for taper lengths of 100 to 300 micron, which indicates an efficient mode conversion. Based on this, tapers of different lengths were realized by grayscale lithography and by reactive ion etching. Their optical testing shows best insertion losses of ~1 dB at 633 nm for multimode to monomode waveguide transitions. (literal)
Note
  • Scopu (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
  • B. Han [1,2], E. Rigo [1,5], R. Guider [1], S. Larcheri [1], G. Nunzi Conti [3], M. R. Vanacharla [1], A. Chiasera [4], M. Ferrari [4], L. Pavesi [1], G. Pucker [2], G. C. Righini [3], M. Ghulinyan [2] [1] Laboratorio Nanoscienze, Dip. di Fisica – Università di Trento,Via Sommarive 14, 38123, Italy [2] Center of Materials and Microsystems, Fondazione Bruno Kessler, Via Sommarive 18, 38123, Italy [3] CNR-IFAC, “Nello Carrara” Institute of Applied Physics, MDF-Lab, Via Madonna del Piano 10, 50019 Sesto Fiorentino, Firenze, Italy [4] CNR-IFN, Inst. Photonics & Nanotechnology, CSMFO Lab, via alla Cascata56/C, Povo, 38123 Trento, Italy [5]. Dip. di Fisica – Università di Modena e Reggio Emilia,Via Campi 213/A, 41100, Italy (literal)
Titolo
  • Development and optical characterization of vertical tapers in SION waveguides using gray-scale lithography (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#isbn
  • 9780819486585 (literal)
Abstract
  • We describe the development of optical waveguides and adiabatic tapers based on SiON-glasses for a lab-on-chip device with fluorescence optical detection. Sensing is based on evanescent near-field excitation of biomolecules captured on the surface of a thin waveguide. First, the composition of SiON waveguides was optimized to reduce losses for visible light. Waveguides with refractive index of ~1.63 showed propagation losses of ~0.8-0.9 dB/cm at 633 nm. A low loss adiabatic taper was developed to convert efficiently the light from a multi mode waveguide into a thin mono-modal one. Design of the taper was done by calculating numerically the transmission efficiency using a finite-difference time-domain method (FDTD). Simulation results show that losses lower than ~1 dB are obtained for taper lengths of 100 to 300 micron, which indicates an efficient mode conversion. Based on this, tapers of different lengths were realized by grayscale lithography and by reactive ion etching. Their optical testing shows best insertion losses of ~1 dB at 633 nm for multimode to monomode waveguide transitions. © (literal)
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