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shallow junctions
Label
shallow junctions (literal)
Membro di
Parole chiave di "Formation and incorporation of SiF4 molecules in F-implanted preamorphized Si"
(Insieme di parole chiave)
Keywords of "Dopant redistribution and electrical activation in silicon following ultra-low energy boron implantation and excimer laser annealing."
(Insieme di parole chiave)
Value
shallow junctions (literal)
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Ha membro
Parole chiave di "Formation and incorporation of SiF4 molecules in F-implanted preamorphized Si"
(Insieme di parole chiave)
Keywords of "Dopant redistribution and electrical activation in silicon following ultra-low energy boron implantation and excimer laser annealing."
(Insieme di parole chiave)