Keywords of "Very low dose ion-implantation effect on heteroepitaxial 3C-SiC mechanical properties"
- Label
- Keywords of "Very low dose ion-implantation effect on heteroepitaxial 3C-SiC mechanical properties" (literal)
- Parole chiave di "Very low dose ion-implantation effect on heteroepitaxial 3C-SiC mechanical properties" (literal)
- Insieme di parole chiave di
- Very low dose ion-implantation effect on heteroepitaxial 3C-SiC mechanical properties (Articolo in rivista) (http://www.cnr.it/ontology/cnr/individuo/prodotto/TIPO1101)
- Ha membro
- mechanical properties (Parola chiave)
- 3C-SiC (Parola chiave)
- microelectromechanical systems (Parola chiave)
- MEMS (Parola chiave)
- ion implantation (Parola chiave)
- Young's modulus (Parola chiave)
Incoming links:
- Insieme di parole chiave
- Very low dose ion-implantation effect on heteroepitaxial 3C-SiC mechanical properties (Articolo in rivista) (http://www.cnr.it/ontology/cnr/individuo/prodotto/TIPO1101)
- Membro di
- mechanical properties (Parola chiave)
- ion implantation (Parola chiave)
- MEMS (Parola chiave)
- 3C-SiC (Parola chiave)
- Young's modulus (Parola chiave)
- microelectromechanical systems (Parola chiave)