Parole chiave di "Studies on phase dependent mechanical properties of dc magnetron sputtered TaN thin films: evaluation of super hardness in orthorhombic Ta4N phase"

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  • Parole chiave di "Studies on phase dependent mechanical properties of dc magnetron sputtered TaN thin films: evaluation of super hardness in orthorhombic Ta4N phase" (literal)
  • Keywords of "Studies on phase dependent mechanical properties of dc magnetron sputtered TaN thin films: evaluation of super hardness in orthorhombic Ta4N phase" (literal)
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