Keywords of "Microwave Annealing of High Dose Al+-implanted 4H-SiC: Towards Device Fabrication"
- Label
- Keywords of "Microwave Annealing of High Dose Al+-implanted 4H-SiC: Towards Device Fabrication" (literal)
- Parole chiave di "Microwave Annealing of High Dose Al+-implanted 4H-SiC: Towards Device Fabrication" (literal)
- Insieme di parole chiave di
- Microwave Annealing of High Dose Al+-implanted 4H-SiC: Towards Device Fabrication (Articolo in rivista) (http://www.cnr.it/ontology/cnr/individuo/prodotto/TIPO1101)
- Ha membro
- electrical characterization (Parola chiave)
- annealing (Parola chiave)
- p-type (Parola chiave)
- post-implantation (Parola chiave)
- ion implantation (Parola chiave)
- p-i-n diodes (Parola chiave)
- Silicon carbide (Parola chiave)
- doping (Parola chiave)
Incoming links:
- Insieme di parole chiave
- Microwave Annealing of High Dose Al+-implanted 4H-SiC: Towards Device Fabrication (Articolo in rivista) (http://www.cnr.it/ontology/cnr/individuo/prodotto/TIPO1101)
- Membro di
- ion implantation (Parola chiave)
- annealing (Parola chiave)
- Silicon carbide (Parola chiave)
- electrical characterization (Parola chiave)
- doping (Parola chiave)
- p-i-n diodes (Parola chiave)
- post-implantation (Parola chiave)
- p-type (Parola chiave)
