Keywords of "Effects of plasma non-homogeneity on the physical properties of sputtered thin films"
- Label
- Keywords of "Effects of plasma non-homogeneity on the physical properties of sputtered thin films" (literal)
- Parole chiave di "Effects of plasma non-homogeneity on the physical properties of sputtered thin films" (literal)
- Insieme di parole chiave di
- Effects of plasma non-homogeneity on the physical properties of sputtered thin films (Articolo in rivista) (http://www.cnr.it/ontology/cnr/individuo/prodotto/TIPO1101)
- Ha membro
- plasma diagnostics (Parola chiave)
- MAGNETRON (Parola chiave)
- titanium nitride (Parola chiave)
- unbalanced magnetron (Parola chiave)
Incoming links:
- Insieme di parole chiave
- Effects of plasma non-homogeneity on the physical properties of sputtered thin films (Articolo in rivista) (http://www.cnr.it/ontology/cnr/individuo/prodotto/TIPO1101)
- Membro di
- plasma diagnostics (Parola chiave)
- MAGNETRON (Parola chiave)
- titanium nitride (Parola chiave)
- unbalanced magnetron (Parola chiave)