Keywords of "Mechanisms for Substrate-Enhanced Growth during the Early Stages 2 of Atomic Layer Deposition of Alumina onto Silicon Nitride Surfaces"

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• Keywords of "Mechanisms for Substrate-Enhanced Growth during the Early Stages 2 of Atomic Layer Deposition of Alumina onto Silicon Nitride Surfaces" (literal)
• Parole chiave di "Mechanisms for Substrate-Enhanced Growth during the Early Stages 2 of Atomic Layer Deposition of Alumina onto Silicon Nitride Surfaces" (literal)

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• Mechanisms for Substrate-Enhanced Growth during the Early Stages 2 of Atomic Layer Deposition of Alumina onto Silicon Nitride Surfaces (Articolo in rivista) (Prodotto della ricerca)

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• TOTAL-ENERGY CALCULATIONS; WAVE BASIS-SET; AB-INITIO; TRIMETHYLALUMINUM; CHEMISORPTION; MOLECULES; MORPHOLOGY; OXIDATION; FEATURES; DENSITY (Parola chiave)

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Insieme di parole chiave

• Mechanisms for Substrate-Enhanced Growth during the Early Stages 2 of Atomic Layer Deposition of Alumina onto Silicon Nitride Surfaces (Articolo in rivista) (Prodotto della ricerca)

Membro di

• TOTAL-ENERGY CALCULATIONS; WAVE BASIS-SET; AB-INITIO; TRIMETHYLALUMINUM; CHEMISORPTION; MOLECULES; MORPHOLOGY; OXIDATION; FEATURES; DENSITY (Parola chiave)