Parole chiave di "Pressure and rf power effects on optical and electrical properties of a-SiC:H films grown in SiH4-C2H2 gas mixtures\"."

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  • Parole chiave di "Pressure and rf power effects on optical and electrical properties of a-SiC:H films grown in SiH4-C2H2 gas mixtures\"." (literal)
  • Keywords of "Pressure and rf power effects on optical and electrical properties of a-SiC:H films grown in SiH4-C2H2 gas mixtures\"." (literal)
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