Keywords of "Structural properties of reactively sputtered W-Si-N thin films"
- Label
- Keywords of "Structural properties of reactively sputtered W-Si-N thin films" (literal)
- Parole chiave di "Structural properties of reactively sputtered W-Si-N thin films" (literal)
- Insieme di parole chiave di
- Structural properties of reactively sputtered W-Si-N thin films (Articolo in rivista) (http://www.cnr.it/ontology/cnr/individuo/prodotto/TIPO1101)
- Ha membro
- W)-SI-N DIFFUSION-BARRIERS (Parola chiave)
- COPPER METALLIZATION (Parola chiave)
- AMORPHOUS (MO (Parola chiave)
- THERMAL-STABILITY (Parola chiave)
- CHEMICAL-VAPOR-DEPOSITION (Parola chiave)
Incoming links:
- Insieme di parole chiave
- Structural properties of reactively sputtered W-Si-N thin films (Articolo in rivista) (http://www.cnr.it/ontology/cnr/individuo/prodotto/TIPO1101)
- Membro di
- CHEMICAL-VAPOR-DEPOSITION (Parola chiave)
- W)-SI-N DIFFUSION-BARRIERS (Parola chiave)
- COPPER METALLIZATION (Parola chiave)
- AMORPHOUS (MO (Parola chiave)
- THERMAL-STABILITY (Parola chiave)
