Keywords of "Chemical vapor deposition of Cr-based thin films as diffusion barriers in copper metallization"

Label

• Keywords of "Chemical vapor deposition of Cr-based thin films as diffusion barriers in copper metallization" (literal)
• Parole chiave di "Chemical vapor deposition of Cr-based thin films as diffusion barriers in copper metallization" (literal)

Insieme di parole chiave di

• Chemical vapor deposition of Cr-based thin films as diffusion barriers in copper metallization (Articolo in rivista) (http://www.cnr.it/ontology/cnr/individuo/prodotto/TIPO1101)

Ha membro

• films (Parola chiave)
• Cr-based layers (Parola chiave)
• MOCVD (Parola chiave)
• Cr3(c (Parola chiave)
• Diffuision barriers (Parola chiave)
• N)2 films (Parola chiave)

Incoming links:

Insieme di parole chiave

• Chemical vapor deposition of Cr-based thin films as diffusion barriers in copper metallization (Articolo in rivista) (http://www.cnr.it/ontology/cnr/individuo/prodotto/TIPO1101)

Membro di

• MOCVD (Parola chiave)
• films (Parola chiave)
• Cr-based layers (Parola chiave)
• Diffuision barriers (Parola chiave)
• Cr3(c (Parola chiave)
• N)2 films (Parola chiave)