Parole chiave di "Role of C in the formation and kinetics of nanovoids induced by He+ implantation in Si"

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  • Parole chiave di "Role of C in the formation and kinetics of nanovoids induced by He+ implantation in Si" (literal)
  • Keywords of "Role of C in the formation and kinetics of nanovoids induced by He+ implantation in Si" (literal)
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