Parole chiave di "Ozone-based atomic layer deposition of alumina from TMA: Growth, morphology, and reaction mechanism"

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• Parole chiave di "Ozone-based atomic layer deposition of alumina from TMA: Growth, morphology, and reaction mechanism" (literal)
• Keywords of "Ozone-based atomic layer deposition of alumina from TMA: Growth, morphology, and reaction mechanism" (literal)

Insieme di parole chiave di

• Ozone-based atomic layer deposition of alumina from TMA: Growth, morphology, and reaction mechanism (Articolo in rivista) (Prodotto della ricerca)

Ha membro

• AL2O3 THIN-FILMS (Parola chiave)
• MOLECULAR-DYNAMICS (Parola chiave)
• WAVE BASIS-SET (Parola chiave)
• TOTAL-ENERGY CALCULATIONS (Parola chiave)
• HFO2 FILMS (Parola chiave)

Incoming links:

Insieme di parole chiave

• Ozone-based atomic layer deposition of alumina from TMA: Growth, morphology, and reaction mechanism (Articolo in rivista) (Prodotto della ricerca)

Membro di

• MOLECULAR-DYNAMICS (Parola chiave)
• TOTAL-ENERGY CALCULATIONS (Parola chiave)
• WAVE BASIS-SET (Parola chiave)
• HFO2 FILMS (Parola chiave)
• AL2O3 THIN-FILMS (Parola chiave)